4

Diagnostics of silicon submicron cylindrical structures obtained by plasma flow action

Année:
2006
Langue:
english
Fichier:
PDF, 411 KB
english, 2006
7

Novel plasma generating systems for advanced materials processing

Année:
2010
Langue:
english
Fichier:
PDF, 1.87 MB
english, 2010
8

Material surface damage by quasistationary compression plasma flow action

Année:
2010
Langue:
english
Fichier:
PDF, 1006 KB
english, 2010